Sulpher Hexa Fluride SF-6 | Maximum Levels of Impurity(ppm by Volume) | ||||||
---|---|---|---|---|---|---|---|
Grade | Air(Liquid Phase as N2)(%) | CF 4(%) | Moisture (PPM) | Acidity Expressed as HF(PPM) | Hydrolyzedly Fluorides as HF | Mineal Content | Oil(PPM) |
Purity 99.9 | <0.05 | <0.05 | 1.0 | <0.1 | <1.0 | <10 | <5 |